Inline-Anlagen
technical dataperformance dataprocess dataproduct dataoperating systemother data
inline type |
B22-600 / B22-900 |
B25-600 / B25-900 |
vacuum chamber (volume) [l] |
11 (175) / 11 (310) |
7 (160) / 7 (215) |
working volume [mm] |
600x600x60 / 900x900x60 |
diam. 180x600 / diam. 180x900 |
vacuum pumps |
4x foreline + 7x turbomolecular |
4x foreline + 6x turbomolecular |
inlet and outlet systems |
2 chamber module |
|
plasma sources |
ion beam - unipolar |
ion beam - bipolar |
sputtering sources |
DC magnetron cathodes |
|
substrate handling |
flat tray |
spindle |
part flow |
linear - horizontal |
linear - vertical |
ultimate vacuum |
< 5 x 10-5 mbar |
|
working pressure |
1 - 3 x 10-3 mbar |
1 - 5 x 10-3 mbar |
plasma sources |
2x 2.5 KW / 3x 2.5 KW |
2x 2.5 KW / 3x 2.5 KW |
sputtering sources |
4x 10KW DC / 4x 15 KW DC |
4x 10 KW DC / 4x 15 KW DC |
substrate bias |
2x 3 KW DC puls |
|
energy consumption [KW] |
40 / 55 |
45 / 65 |
cycle time [sec] |
40 - 75 |
40 - 180 |
substrate heating |
none |
electron bombardment |
plasma treatment |
ion bombardment |
|
metallization |
multilayer - nanolayer |
|
plasma deposition |
non reactive |
non reactive - reactive |
target materials |
Al-Cr-Cu-In-Mo-Sn-SS-Ti-Zr ... |
|
substrates (optional) |
plastic, (glass), (ceramic) |
plastic, metal, glass, ceramic |
application (optional) |
decorative - (EMI) |
decorative - functional |
PVD coatings |
metallic layers |
metallic layers - hardcoatings |
hardware |
2x industrial PC - control and visualization |
|
display |
19" touch screen |
|
software |
windows multilanguage - hartec |
|
user access |
secured operator level access |
|
operation |
manu (macro) - auto (start-stop-principle) |
|
reporting |
batch data report, graphic display, QC analysis |
|
special software |
troubleshooting, maintenance, remote control |
|
special feature |
multi machine network technology for worldwide process transfer and data exchange |
|
equipment size BxLxH [m] |
2.5x12.5x1.8 / 3.0x17x1.8 |
3.0x5.0x2.0 / 3.0x5.0x2.5 |
operating area BxLxH [m] |
5.0x15.0x3.0 / 6.0x20x3.0 |
6.0x10.0x3.0 / 6.0x10,0x3.5 |
room air quality |
positive air, 18-22°C |
|
cooling system |
DI water, 20-22 °C, 2.5 bar |
|
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